Hitachi Wafer Alignment Unit with SunX Laser Line Controller FEM-312 EFEM Used 115609-D This MKS Instruments 115610

115609-D This MKS Instruments 115610 Main Board PCB 115609-D 152H-P0 Type 152 used working surplus

This VAT 231376 Atmospheric Door Spare Plate Kit is new surplus

Part No: HT718-000

Inventory # K-5535

Hitachi Wafer Alignment Unit with SunX Laser Line Controller FEM-312 EFEM Used 115609-D This MKS Instruments 115610Hitachi Wafer Alignment Unit with SunX Laser Line Controller FEM 312 EFEM Used Inventory # A 12824 This Hitachi Wafer Alignment Unit with SunX Laser Line Controller FEM 312 EFEM is used working surplus. The physical condition is good, but there are signs of previous use and handling. Specifications Part No: Alignment Unit Configured for 300mm Wafers Removed from a Hitachi FEM 312 EFEM Equipment Front End Module Installed Components Hitachi PCB Part